Veeco delivers revolutionary Low-Cost-of-Ownership, HVM production-proven thermal annealing solutions at the most advanced technology nodes.
Making a Material Difference with Leading Laser Spike Annealing Technology
Low Thermal Budget - improved critical device performance with diffusion-less super activation
Elimination of Deactivation - Dual Beam Technology maintains device improvements with no dopant deactivation
Reduction of Pattern Dependency Within Die and Die-to-Die uniformity improvement
Closed-Loop Temperature Control Reliable production with Real-Time process control & FDC
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